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1
Published 1983
American Chemical Society
Subjects: “...Microlithography...”
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2
Published 1985
American Chemical Society
Subjects: “...Microlithography / Materials...”
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3
Published 1989
American Chemical Society
Subjects: “...Microlithography / Materials...”
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4
Published 2005
Springer Berlin Heidelberg
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5
by Ma, Xu
Published 2010
Wiley
Subjects: “...Microlithography / Mathematics...”
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6
Published 1988
American Chemical Society
Subjects: “...Microlithography / Materials...”
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7
Published 1989
American Chemical Society
Subjects: “...Microlithography / Research...”
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8
Published 1993
American Chemical Society
Subjects: “...Microlithography / Technique...”
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9
Published 1998
American Chemical Society
Subjects: “...Microlithography / Molecular aspects / Research...”
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10
Published 1998
American Chemical Society
Subjects: “...Microlithography...”
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11
Published 1987
American Chemical Society
Subjects: “...Microlithography / Materials...”
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12
Published 1989
American Chemical Society
Subjects: “...Microlithography / Application...”
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13
Published 1996
American Chemical Society
Subjects: “...Microlithography...”
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14
Published 1988
Springer Berlin Heidelberg
Table of Contents: “... -- Application of polymer in encapsulation of electronic parts -- Photoresist systems for microlithography...”
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15
Published 2005
Springer Berlin Heidelberg
Table of Contents: “...-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings...”
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16
by Valiev, Kamil A.
Published 1992
Springer US
Table of Contents: “... Microlithography -- 5. Optical Lithography -- 6. Procedures for Processing Exposed Resist Films and Resist Mask...”
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17
by Bargon, Joachim
Published 1984
Springer US
Table of Contents: “... -- Photolithography and X-Ray Lithography -- Electron Beam Lithography -- Microlithography for VLSI and Beyond...”
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18
Published 2020
Springer International Publishing
Table of Contents: “...-microlithography fabrication of the parts of a micro-mechanical calculator -- Fabricating solid state gears...”
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19
Published 1982
Springer US
Table of Contents: “... Produced by Microlithography -- Nonlinear Optical Effects -- List of Contributors...”
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20
Published 2007
Springer Berlin Heidelberg
Table of Contents: “... for Microlithography -- Significance of Hybrid Evolutionary Computation for Ab Initio Protein Folding Prediction -- A...”