Cover Image
Read Now

Materials for microlithography radiation-sensitive polymers

Bibliographic Details
Corporate Authors: American Chemical Society Division of Polymeric Materials: Science and Engineering, American Chemical Society Division of Polymer Chemistry, American Chemical Society Meeting ( 1984, St. Louis, Missouri)
Other Authors: Thompson, L. F. (Editor), Willson, C. G. (Editor), Fréchet, J. M. J. (Editor)
Format: eBook
Language:English
Published: Washington, DC American Chemical Society 1985, 1985
Series:ACS symposium series
Subjects:
Phenols / Radiation Effects
Vinyl Polymers / Analysis
Elastomers / Stability
Silicone Elastomers / Radiation Effects
Aliphatic Compounds / Analysis
Silicones / Radiation Effects
Maleic Anhydrides / Radiation Effects
Polystyrenes / Radiation Effects
Photochemistry
Copolymers / Analysis
Azides / Radiation Effects
Aldehydes / Radiation Effects
Ketones / Radiation Effects
Phenolic Resins / Analysis
Alkenes / Radiation Effects
Maleic Anhydride / Analysis
Polymerization
Addition Polymerization / Reactivity
Printing
Electronics
Crystals / Analysis
Microlithography / Materials
Polymers / Radiation Effects
Photoresists
Polymers / Deterioration
Epoxy Compounds / Analysis
Polymers / Reactivity
Negative Resistance Devices
Polymers
Charge Exchange / Analysis
Radiation / Utilization
Silanes / Radiation Effects
Pulse Radiolysis / Research
Technology & Engineering / Textiles & Polymers / Bisacsh
Azides / Analysis
Lasers
Microelectronics / Materials
Methacrylates / Radiation Effects
Vinyl Compounds / Radiation Effects
Lithography / Application
Lithography / Analysis
Photosensitizing Compounds
Coatings / Analysis
Aldehydes / Analysis
Lithography, Electron Beam
Epoxy Compounds / Radiation Effects
Polystyrene / Analysis
Electron Beams / Analysis
Polystyrenes / Chemical Synthesis
Polymers / Synthesis
Technology & Engineering / Materials Science / Electronic Materials / Bisacsh
Polymers / Imaging
Pulse Radiolysis
Radiation Chemistry
Online Access:
Collection: ACS Symposium Series - Collection details see MPG.ReNa
Description
Item Description:Distributed in print by Oxford University Press
Physical Description:508 pages illustrations
ISBN:9780841210943

Similar Items