Materials for microlithography radiation-sensitive polymers

Bibliographic Details
Corporate Authors: American Chemical Society Division of Polymeric Materials: Science and Engineering, American Chemical Society Division of Polymer Chemistry, American Chemical Society Meeting ( 1984, St. Louis, Missouri)
Other Authors: Thompson, L. F. (Editor), Willson, C. G. (Editor), Fréchet, J. M. J. (Editor)
Format: eBook
Published: Washington, DC American Chemical Society 1985, 1985
Series:ACS symposium series
Online Access:
Collection: ACS Symposium Series - Collection details see MPG.ReNa
Item Description:Distributed in print by Oxford University Press
Physical Description:508 pages illustrations