MPG.eBooks - Description: Polymers for microelectronics

Cover Image

Read Now

Polymers for microelectronics resists and dielectrics

Bibliographic Details
Corporate Authors:	American Chemical Society Division of Polymeric Materials: Science and Engineering, American Chemical Society Meeting ( 1992, San Francisco, California)
Other Authors:	Thompson, L. F. (Editor), Willson, C. G. (Editor), Tagawa, Seiichi (Editor)
Format:	eBook
Language:	English
Published:	Washington, DC American Chemical Society 1993, 1993
Series:	ACS symposium series
Subjects:	Technology & Engineering / Electronics / Microelectronics / Bisacsh Intermediates (chemistry) Formaldehyde / Analysis Polyarylethers / Synthesis Positronium / Formation Perfluorinated Chemicals / Synthesis Microlithography / Technique Chemical Vapor Deposition / Application Photoresists / Design Pyrimidines / Analysis Methacrylic Acid / Analysis Photoresists / Technological Innovations Azides / Evaluation Photosensitizing Agents Photochromism Polyvinyl Alcohol / Morphology Acrylic Resins / Analysis Surface Chemistry Polyvinyl Alcohol Electroplating Polyimides / Application Electronics Aromaticity (chemistry) Azides Organometallic Compounds Thin Films, Multilayered / Analysis Polymers Pyrrolesxstability Copolymers / Dissolution Technology & Engineering / Textiles & Polymers / Bisacsh Absorption Spectra / Application Organic Compounds / Absorption And Adsorption Microelectronics / Materials Calorimetry / Utilization Photosensitizing Compounds Polytef / Processing Pyrroles / Effect Of High Temperatures On Polyimides / Measurement Electroless Plating / Application Polytetrafluoroethylene Calorimetry Microtechnology Pyrroles Silicon Oxide / Formation Polymethacrylic Acids / Analysis Polyphosphazenes / Modification Ring Formation (chemistry)
Online Access:	https://pubs.acs.org/doi/book/10.1021/bk-1994-0537
Collection:	ACS Symposium Series - Collection details see MPG.ReNa

Description
Item Description:	"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.". - Errata slip inserted. - Distributed in print by Oxford University Press
Physical Description:	588 pages illustrations
ISBN:	9780841213937