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Polymers in microlithography materials and processes

Bibliographic Details
Corporate Authors: American Chemical Society Division of Polymeric Materials: Science and Engineering, American Chemical Society Meeting ( 1989, Dallas, Texas)
Other Authors: Reichmanis, Elsa (Editor), MacDonald, Scott A. (Editor), Iwayanagi, Takao (Editor)
Format: eBook
Language:English
Published: Washington, DC American Chemical Society 1989, 1989
Series:ACS symposium series
Subjects:
Electrons
Thermistors / Analysis
Imaging Systems / Design
Polymers / Analysis
Spectrum Analysis
Polymers / Structure
Quartz Crystal Microbalance Techniques
Pyrimidines / Derivatives
Laser Therapy
Thin Films, Multilayered / Spectra
Quartz Crystal Microbalances / Utilization
Laser Ablation / Evaluation
Temperature
Anhydrides
Electron Beams / Utilization
Phenolic Resins / Dissolution
Anhydrides / Formation
Interferometers / Analysis
Crosslinking (polymerization)
Photochemistry / Application
Polymerization
Printing
Far Ultraviolet Radiation / Utilization
Anthocyanins / Analysis
Plasma Etching / Chemical Resistance
Ultraviolet Radiation / Utilization
Fluorescence
Microlithography / Materials
Surface Properties
Lasers, Excimer
Photoresists
Ultraviolet Rays
Semiconductors
Time-resolved Spectroscopy / Utilization
Polymers
Electric Impedance
Thiosulfates
Fluorescence / Quenching
Anthracene / Analysis
Pyrimidines
Image Processing, Computer-assisted
Technology & Engineering / Textiles & Polymers / Bisacsh
Engraving And Engravings
Plasma Gases / Analysis
Excimer Lasers / Utilization
Phenolic Resins / Evaluation
Plasma Etching / Mechanism Of Action
Polystyrene / Application
Block Copolymers / Analysis
Polyzwitterions / Analysis
Polymers / Chemistry
Plasma Polymerization / Analysis
Technology & Engineering / Materials Science / Electronic Materials / Bisacsh
Photochemical Processes
Plasma Gases / Pharmacology
Polystyrenes
Resins, Synthetic
Optical Devices
Thiosulfates / Characterization
Plasma Gases
Online Access:
Collection: ACS Symposium Series - Collection details see MPG.ReNa
Description
Item Description:"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989.". - Distributed in print by Oxford University Press
Physical Description:468 pages illustrations
ISBN:9780841212688

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