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Excimer Laser Technology

This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this co...

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Bibliographic Details
Other Authors: Basting, Dirk (Editor), Marowsky, Gerd (Editor)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2005, 2005
Edition:1st ed. 2005
Subjects:
Physical Measurements
Physical Chemistry
Engineering
Photonics
Lasers
Measurement Science And Instrumentation
Optics, Lasers, Photonics, Optical Devices
Engineering, General
Measurement   
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Description
Summary:This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology
Physical Description:XX, 433 p online resource
ISBN:9783540266679

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