Ion Implantation: Equipment and Techniques : Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982

Corporate Author: SpringerLink (Online service)
Other Authors: Ryssel, H. (Editor), Glawischnig, H. (Editor)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 1983, 1983
Edition:1st ed. 1983
Series:Springer Series in Electronics and Photonics
Subjects:
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Physical Description:X, 558 p online resource
ISBN:9783642691560