Ion Implantation Techniques Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982
| Other Authors: | , |
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1982, 1982
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| Edition: | 1st ed. 1982 |
| Series: | Springer Series in Electronics and Photonics
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| Subjects: | |
| Online Access: | |
| Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
| Physical Description: | XII, 374 p online resource |
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| ISBN: | 9783642687792 |