Ion Implantation: Equipment and Techniques Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982
| Other Authors: | , |
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1983, 1983
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| Edition: | 1st ed. 1983 |
| Series: | Springer Series in Electronics and Photonics
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| Subjects: | |
| Online Access: | |
| Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
| Physical Description: | X, 558 p online resource |
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| ISBN: | 9783642691560 |