APA Citation

Ryssel, H., & Glawischnig, H. (1983). Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982 (1st ed. 1983.). Berlin, Heidelberg: Springer Berlin Heidelberg.

Chicago Style Citation

Ryssel, H., and H. Glawischnig. Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982. 1st ed. 1983. Berlin, Heidelberg: Springer Berlin Heidelberg, 1983.

MLA Citation

Ryssel, H., and H. Glawischnig. Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982. 1st ed. 1983. Berlin, Heidelberg: Springer Berlin Heidelberg, 1983.