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230607 ||| eng |
| 020 |
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|a 9780841210400
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| 050 |
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4 |
|a TR940
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| 100 |
1 |
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|a Thompson, L. F.
|e [editor]
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| 245 |
0 |
0 |
|a Introduction to microlithography
|b theory, materials, and processing
|c L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
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| 260 |
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|a Washington, DC
|b American Chemical Society
|c 1983, 1983
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| 300 |
|
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|a 380 pages
|b illustrations
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| 505 |
0 |
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|a Includes bibliographical references and index
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| 653 |
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|a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics / bisacsh
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| 653 |
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|a Photoresists
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| 653 |
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|a Semiconductors
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| 653 |
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|a Plasma etching
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| 653 |
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|a Physical Phenomena
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| 653 |
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|a Lithography / Research
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| 653 |
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|a Photolithography
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| 653 |
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|a Transistors, Electronic
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| 653 |
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|a Miniaturization
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| 653 |
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|a Microlithography
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| 653 |
|
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|a Chemical Phenomena
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| 653 |
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|a Semiconductors / Etching
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| 653 |
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|a Printing
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| 653 |
|
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|a Electronics
|
| 700 |
1 |
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|a Willson, C. G.
|e [editor]
|
| 700 |
1 |
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|a Bowden, M. J.
|e [editor]
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| 710 |
2 |
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|a American Chemical Society
|b Division of Organic Coating and Plastics Chemistry
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| 710 |
2 |
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|a American Chemical Society
|b Meeting ( 1983, Seattle, Washington)
|
| 041 |
0 |
7 |
|a eng
|2 ISO 639-2
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| 989 |
|
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|b ACS
|a ACS Symposium Series
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| 490 |
0 |
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|a ACS symposium series
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| 500 |
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|a Distributed in print by Oxford University Press
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| 856 |
4 |
0 |
|u https://pubs.acs.org/doi/book/10.1021/bk-1983-0219
|x Verlag
|3 Volltext
|
| 082 |
0 |
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|a 621.3815/31
|