MPG.eBooks - Author Search Results

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1

Polymers for microelectronics : resists and dielectrics

Published 1993

American Chemical Society

Other Authors: “...Thompson, L. F....”

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2

Introduction to microlithography : theory, materials, and processing

Published 1983

American Chemical Society

Other Authors: “...Thompson, L. F....”

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3

Materials for microlithography : radiation-sensitive polymers

Published 1985

American Chemical Society

Other Authors: “...Thompson, L. F....”