MPG.eBooks - Search Results - "microlithography"

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1

Introduction to microlithography : theory, materials, and processing

Published 1983

American Chemical Society

Subjects: “...Microlithography...”

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2

Materials for microlithography : radiation-sensitive polymers

Published 1985

American Chemical Society

Subjects: “...Microlithography / Materials...”

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3

Polymers in microlithography : materials and processes

Published 1989

American Chemical Society

Subjects: “...Microlithography / Materials...”

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4

Polymers for microelectronics : resists and dielectrics

Published 1993

American Chemical Society

Subjects: “...Microlithography / Technique...”

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5

Organic thin films : structure and applications

Published 1998

American Chemical Society

Subjects: “...Microlithography / Molecular aspects / Research...”

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6

Micro- and nanopatterning polymers

Published 1998

American Chemical Society

Subjects: “...Microlithography...”

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7

Polymers for high technology : electronics and photonics

Published 1987

American Chemical Society

Subjects: “...Microlithography / Materials...”

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8

Irradiation of polymers : fundamentals and technological applications

Published 1996

American Chemical Society

Subjects: “...Microlithography...”