MPG.eBooks - Table of Contents: Polymers in microlithography

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Polymers in microlithography materials and processes

Bibliographic Details
Corporate Authors:	American Chemical Society Division of Polymeric Materials: Science and Engineering, American Chemical Society Meeting ( 1989, Dallas, Texas)
Other Authors:	Reichmanis, Elsa (Editor), MacDonald, Scott A. (Editor), Iwayanagi, Takao (Editor)
Format:	eBook
Language:	English
Published:	Washington, DC American Chemical Society 1989, 1989
Series:	ACS symposium series
Subjects:	Electrons Thermistors / Analysis Imaging Systems / Design Polymers / Analysis Spectrum Analysis Polymers / Structure Quartz Crystal Microbalance Techniques Pyrimidines / Derivatives Laser Therapy Thin Films, Multilayered / Spectra Quartz Crystal Microbalances / Utilization Laser Ablation / Evaluation Temperature Anhydrides Electron Beams / Utilization Phenolic Resins / Dissolution Anhydrides / Formation Interferometers / Analysis Crosslinking (polymerization) Photochemistry / Application Polymerization Printing Far Ultraviolet Radiation / Utilization Anthocyanins / Analysis Plasma Etching / Chemical Resistance Ultraviolet Radiation / Utilization Fluorescence Microlithography / Materials Surface Properties Lasers, Excimer Photoresists Ultraviolet Rays Semiconductors Time-resolved Spectroscopy / Utilization Polymers Electric Impedance Thiosulfates Fluorescence / Quenching Anthracene / Analysis Pyrimidines Image Processing, Computer-assisted Technology & Engineering / Textiles & Polymers / Bisacsh Engraving And Engravings Plasma Gases / Analysis Excimer Lasers / Utilization Phenolic Resins / Evaluation Plasma Etching / Mechanism Of Action Polystyrene / Application Block Copolymers / Analysis Polyzwitterions / Analysis Polymers / Chemistry Plasma Polymerization / Analysis Technology & Engineering / Materials Science / Electronic Materials / Bisacsh Photochemical Processes Plasma Gases / Pharmacology Polystyrenes Resins, Synthetic Optical Devices Thiosulfates / Characterization Plasma Gases
Online Access:	https://pubs.acs.org/doi/book/10.1021/bk-1989-0412
Collection:	ACS Symposium Series - Collection details see MPG.ReNa

Table of Contents:

Includes bibliographical references and index