Crystal growth and evaluation of silicon for VLSI and ULSI
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because...
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| Format: | eBook |
| Language: | English |
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Boca Raton
CRC Press
2015
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| Collection: | O'Reilly - Collection details see MPG.ReNa |
Table of Contents:
- Includes bibliographical references and index
- 1. Introduction
- 2. Silicon : the key material for integrated circuit fabrication technology
- 3. Importance of single crystals for integrated circuit fabrication
- 4. Different techniques for growing single-crystal silicon
- 5. From silicon ingots to silicon wafers
- 6. Evaluation of silicon wafers
- 7. Resistivity and impurity concentration mapping of silicon wafers
- 8. Impurities in silicon wafers
- 9. Defects in silicon wafers
- 10. Silicon wafer preparation for VLSI and ULSI processing
- 11. Packing of silicon wafers