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220922 ||| eng |
| 020 |
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|a 0429068395
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| 020 |
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|a 1482232820
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| 020 |
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|a 9781482232820
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| 020 |
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|a 9780429068393
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| 020 |
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|a 9781322637693
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| 050 |
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4 |
|a QD921
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| 100 |
1 |
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|a Eranna, G.
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| 245 |
0 |
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|a Crystal growth and evaluation of silicon for VLSI and ULSI
|c Golla Eranna
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| 260 |
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|a Boca Raton
|b CRC Press
|c 2015
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| 300 |
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|a xvii, 411 pages
|b illustrations
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| 505 |
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|a Includes bibliographical references and index
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| 505 |
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|a 1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers
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| 653 |
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|a Cristaux / Croissance
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| 653 |
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|a Silicon crystals / Electric properties / fast
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| 653 |
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|a Silicium cristallisé
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| 653 |
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|a Circuits intégrés à très grande échelle
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| 653 |
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|a Crystal growth / fast
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| 653 |
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|a Integrated circuits / Very large scale integration / http://id.loc.gov/authorities/subjects/sh85067125
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| 653 |
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|a Integrated circuits / Very large scale integration / fast
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| 653 |
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|a Silicon crystals / http://id.loc.gov/authorities/subjects/sh85122523
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| 653 |
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|a Integrated circuits / Ultra large scale integration / http://id.loc.gov/authorities/subjects/sh94000436
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| 653 |
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|a Silicon crystals / Electric properties / http://id.loc.gov/authorities/subjects/sh85122524
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| 653 |
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|a Integrated circuits / Ultra large scale integration / fast
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| 653 |
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|a Circuits intégrés à ultra-grande échelle
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| 653 |
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|a Silicon crystals / fast
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| 653 |
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|a Crystal growth / http://id.loc.gov/authorities/subjects/sh85034507
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| 653 |
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|a TECHNOLOGY & ENGINEERING / Chemical & Biochemical / bisacsh
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| 041 |
0 |
7 |
|a eng
|2 ISO 639-2
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| 989 |
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|b OREILLY
|a O'Reilly
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| 500 |
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|a "A Chapman & Hall book."
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| 028 |
5 |
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|a 10.1201/b17812
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| 776 |
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|z 9781482232820
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| 776 |
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|z 1482232820
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| 776 |
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|z 9781138034198
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| 776 |
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|z 9781482232813
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| 856 |
4 |
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|u https://learning.oreilly.com/library/view/~/9781482232813/?ar
|x Verlag
|3 Volltext
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| 082 |
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|a 661.0683
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| 082 |
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|a 620
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| 520 |
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|a Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges
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