Crystal growth and evaluation of silicon for VLSI and ULSI
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because...
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| Format: | eBook |
| Language: | English |
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Boca Raton
CRC Press
2015
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| Collection: | O'Reilly - Collection details see MPG.ReNa |
| Summary: | Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges |
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| Item Description: | "A Chapman & Hall book." |
| Physical Description: | xvii, 411 pages illustrations |
| ISBN: | 0429068395 1482232820 9781482232820 9780429068393 9781322637693 |