1
Published 1989
American Chemical Society
Subjects: ...Microlithography / Materials...

2
Published 1987
SPIE

3
Published 1985
American Chemical Society
Subjects: ...Microlithography / Materials...

4
Published 1983
American Chemical Society
Subjects: ...Microlithography...

5
Published 2010
SPIE

6
Published 2008
SPIE

7
Published 2007
SPIE

8
Published 2002
SPIE

9
Published 2001
SPIE

10
Published 1997
SPIE

11
Published 2005
Springer Berlin Heidelberg

12
Published 2015
SPIE

13
Published 2009
SPIE

14
Published 2005
SPIE

15
Published 2005
SPIE

16
Published 2006
SPIE

17
Published 1999
SPIE

18
Published 1998
SPIE

19
Published 1993
SPIE

20
Published 2000
SPIE