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author_facet:"Thompson, L. F."
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1
Materials for microlithography : radiation-sensitive polymers
Published 1985
American Chemical Society
Subjects:
“
...Vinyl
polymers
/ Analysis...
”
Call Number:
TK7871.15.P6
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2
Polymers for microelectronics : resists and dielectrics
Published 1993
American Chemical Society
Subjects:
“
...
Polymers
...
”
Call Number:
TK7871.15.P6
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Author: Thompson, L. F.
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621 - Applied physics
2
Language
English
2
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ACS Symposium Series
2
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American Chemical Society Division of Polymeric Materials: Science and Engineering
2
Thompson, L. F.
Willson, C. G.
2
American Chemical Society Division of Polymer Chemistry
1
American Chemical Society Meeting ( 1984, St. Louis, Missouri)
1
American Chemical Society Meeting ( 1992, San Francisco, California)
1
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Fréchet, J. M. J.
1
Tagawa, Seiichi
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