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220928 ||| eng |
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|a 9789264502437
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| 245 |
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|a Chemicals Vapour Deposition in the Semiconductor Industry
|h Elektronische Ressource
|c Organisation for Economic Co-operation and Development
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| 260 |
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|a Paris
|b OECD Publishing
|c 2015
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| 300 |
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|a 80 p
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| 653 |
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|a Environment
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| 710 |
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|a Organisation for Economic Co-operation and Development
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| 041 |
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|a eng
|2 ISO 639-2
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| 989 |
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|b OECD
|a OECD Books and Papers
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| 490 |
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|a Series on Emission Scenario Documents
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| 024 |
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|a /10.1787/b0957a80-en
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| 856 |
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|a oecd-ilibrary.org
|u https://doi.org/10.1787/b0957a80-en
|x Verlag
|3 Volltext
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|a 363
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| 520 |
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|a This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors
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