Chemicals Vapour Deposition in the Semiconductor Industry
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases...
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| Format: | eBook |
| Language: | English |
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Paris
OECD Publishing
2015
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| Series: | Series on Emission Scenario Documents
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| Collection: | OECD Books and Papers - Collection details see MPG.ReNa |
| Summary: | This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors |
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| Physical Description: | 80 p |
| ISBN: | 9789264502437 |