Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen
This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.
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| Format: | eBook |
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KIT Scientific Publishing
2015
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| Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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| Collection: | Directory of Open Access Books - Collection details see MPG.ReNa |
| Summary: | This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market. |
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| Item Description: | Creative Commons (cc), https://creativecommons.org/licenses/by-sa/4.0/ |
| Physical Description: | 1 electronic resource (VII, 211 p. p.) |
| ISBN: | 1000045013 9783731503262 |