Transmission electron microscopy in micro-nanoelectronics
Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in indust...
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| Format: | eBook |
| Language: | English |
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London
ISTE, Ltd.
2013
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| Series: | ISTE
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| Collection: | O'Reilly - Collection details see MPG.ReNa |
| Summary: | Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs. This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face |
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| Physical Description: | 259 pages |
| ISBN: | 111857902X 9781118579022 1118579038 9781118579053 1848213670 9781118579039 1118579054 |