Semiconductor devices physics and technology

Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections...

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Bibliographic Details
Main Author: Sze, S. M.
Other Authors: Lee, M. K.
Format: eBook
Language:English
Published: New York, NY Wiley 2012
Edition:3rd ed
Subjects:
Online Access:
Collection: O'Reilly - Collection details see MPG.ReNa
Description
Summary:Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices
Physical Description:1 volume illustrations
ISBN:0470537949