Laser Heat-Mode Lithography Principle and Methods
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applicati...
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| Format: | eBook |
| Language: | English |
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Singapore
Springer Nature Singapore
2019, 2019
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| Edition: | 1st ed. 2019 |
| Series: | Springer Series in Materials Science
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| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Current status of lithography
- Principles of laser heat-mode lithography and thermal diffusion
- Laser heat-mode maskless lithography system
- Manipulation of thermal diffusion channels
- Laser heat-mode nanolithography on phase-change thin films
- Direct laser heat-mode nanopatterning on metallo-organic compound thin films
- Laser heat-mode patterning of transparent thin films
- Laser heat-mode grayscale image lithography
- Patterns transfer processes and applications