Subsecond Annealing of Advanced Materials Annealing by Lasers, Flash Lamps and Swift Heavy Ions
The thermal processing of materials ranges from few femtoseconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elem...
Other Authors: | , |
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Format: | eBook |
Language: | English |
Published: |
Cham
Springer International Publishing
2014, 2014
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Edition: | 1st ed. 2014 |
Series: | Springer Series in Materials Science
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Subjects: | |
Online Access: | |
Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Summary: | The thermal processing of materials ranges from few femtoseconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials |
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Physical Description: | XVII, 321 p. 205 illus., 59 illus. in color online resource |
ISBN: | 9783319031316 |