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Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

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Bibliographic Details
Main Authors: Claeys, Cor, Simoen, Eddy (Author)
Format: eBook
Language:English
Published: Cham Springer International Publishing 2018, 2018
Edition:1st ed. 2018
Series:Springer Series in Materials Science
Subjects:
Semiconductors
Electronic Circuits
Optical Materials
Telecommunication
Electronic Circuits And Systems
Microwaves, Rf Engineering And Optical Communications
Materials / Analysis
Characterization And Analytical Technique
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • Preface
  • Introduction
  • Basic Properties of Metals in Semiconductors
  • Sources of Metals in Si and Ge Processing
  • Characterization and Detection of Metals in Silicon and Germanium
  • Electrical Activity of Metals in Si and Ge
  • Impact of Metals on Silicon Devices and Circuits
  • Gettering and Passivation of Metals in Silicon and Germanium
  • Modeling and Simulation of Metals in Silicon and Germanium
  • Conclusions

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