Photoresist Use in Semiconductor Manufacturing
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry. The document presents standard approaches for estimating environmental releases of and occupational exposures to...
| Corporate Author: | |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Paris
OECD Publishing
2014
|
| Series: | Series on Emission Scenario Documents
|
| Subjects: | |
| Online Access: | |
| Collection: | OECD Books and Papers - Collection details see MPG.ReNa |
| Summary: | This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry. The document presents standard approaches for estimating environmental releases of and occupational exposures to additives and components used in photoresist formulations. |
|---|---|
| Physical Description: | 117 p |
| ISBN: | 9789264221161 |