Theory and Application of Laser Chemical Vapor Deposition
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemi...
Main Authors: | , |
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Format: | eBook |
Language: | English |
Published: |
New York, NY
Springer US
1995, 1995
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Edition: | 1st ed. 1995 |
Series: | Lasers, Photonics, and Electro-Optics
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Subjects: | |
Online Access: | |
Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
Summary: | In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system |
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Physical Description: | XII, 396 p online resource |
ISBN: | 9781489914309 |