Theory and Application of Laser Chemical Vapor Deposition
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemi...
| Main Authors: | , |
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| Format: | eBook |
| Language: | English |
| Published: |
New York, NY
Springer US
1995, 1995
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| Edition: | 1st ed. 1995 |
| Series: | Lasers, Photonics, and Electro-Optics
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| Subjects: | |
| Online Access: | |
| Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
Table of Contents:
- 1. Introduction
- 2. Pyrolytic LCVD
- 3. Photolytic LCVD
- 4. Pyrolytic LCVD Modeling
- 5. Photolytic LCVD Modeling
- A.1. Definitions of Energy Density, Irradiance, and Intensity
- A.2. Thermal Stress Analysis
- A.3. Volumetric Absorption Rate
- Nomenclature
- References