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131205 ||| eng |
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|a 9781461491767
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| 100 |
1 |
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|a Kondo, Kazuo
|e [editor]
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| 245 |
0 |
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|a Copper Electrodeposition for Nanofabrication of Electronics Devices
|h Elektronische Ressource
|c edited by Kazuo Kondo, Rohan N. Akolkar, Dale P. Barkey, Masayuki Yokoi
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| 250 |
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|a 1st ed. 2014
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| 260 |
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|a New York, NY
|b Springer New York
|c 2014, 2014
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| 300 |
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|a VIII, 282 p. 190 illus., 75 illus. in color
|b online resource
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| 505 |
0 |
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|a Copper Electrodeposition -- Suppression Effect and Additive Chemistry -- Acceleration Effect -- Modeling and Simulation -- Frontiers of Cu Electrodeposition and Electroless Plating for On-Chip Interconnects -- Microstructure of Evolution of Copper in Nano-scale Interconnect Features -- Direct Copper Plating -- Through Silicon Via -- Build-up Printed Wiring Boards -- Copper Foil Smooth on Both Sides for Lithium Ion Battery -- Through Hole Plating
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| 653 |
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|a Electrochemistry
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| 653 |
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|a Electrochemistry
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| 653 |
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|a Solid State Physics
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| 653 |
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|a Electronics and Microelectronics, Instrumentation
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| 653 |
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|a Electronics
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| 653 |
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|a Nanotechnology
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| 653 |
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|a Microelectronics
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| 653 |
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|a Nanotechnology
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| 653 |
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|a Solid state physics
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| 700 |
1 |
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|a Akolkar, Rohan N.
|e [editor]
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| 700 |
1 |
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|a Barkey, Dale P.
|e [editor]
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| 700 |
1 |
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|a Yokoi, Masayuki
|e [editor]
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| 041 |
0 |
7 |
|a eng
|2 ISO 639-2
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| 989 |
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|b Springer
|a Springer eBooks 2005-
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| 490 |
0 |
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|a Nanostructure Science and Technology
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| 856 |
4 |
0 |
|u https://doi.org/10.1007/978-1-4614-9176-7?nosfx=y
|x Verlag
|3 Volltext
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| 082 |
0 |
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|a 541.37
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| 520 |
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|a This book discusses the scientific mechanism of copper electrodeposition and it's wide range of applications. The book will cover everything from the basic fundamentals to practical applications. In addition, the book will also cover important topics such as: • ULSI wiring material based upon copper nanowiring • Printed circuit boards • Stacked semiconductors • Through Silicon Via • Smooth copper foil for Lithium-Ion battery electrodes This book is ideal for nanotechnologists, industry professionals, and practitioners
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