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| 008 |
130626 ||| eng |
| 020 |
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|a 9783540266679
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| 100 |
1 |
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|a Basting, Dirk
|e [editor]
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| 245 |
0 |
0 |
|a Excimer Laser Technology
|h Elektronische Ressource
|c edited by Dirk Basting, Gerd Marowsky
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| 250 |
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|a 1st ed. 2005
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| 260 |
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|a Berlin, Heidelberg
|b Springer Berlin Heidelberg
|c 2005, 2005
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| 300 |
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|a XX, 433 p
|b online resource
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| 505 |
0 |
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|a Introductory Remarks -- Fundamentals -- Some Fundamentals of Laser Physics -- Principles of Excimer Lasers -- Design and Technology of Excimer Lasers -- High-Repetition-Rate and High-Power Lasers -- High-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings for Excimer Laser Applications -- Small Structures with Large Excimer Lasers -- Historical Review of Excimer Laser Development -- Applications -- Overview -- Ablation -- Micro-Machining -- Via Drilling -- Micro-Processing of Borosilicate Glass and Polymers -- F2-Laser Microfabrication for Photonics and Biophotonics -- Nano-Structuring with Femtosecond Excimer Laser Pulses -- Physical Aspects of Ultra-Fast UV Laser Transfer -- Microlithography -- TFT Annealing -- Fiber Bragg Gratings -- Marking -- Activation and Metallization of Dielectrics -- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films -- Combustion Analysis -- Medical
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| 653 |
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|a Physical measurements
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| 653 |
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|a Physical chemistry
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| 653 |
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|a Engineering
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| 653 |
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|a Physical Chemistry
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| 653 |
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|a Photonics
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| 653 |
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|a Lasers
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| 653 |
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|a Measurement Science and Instrumentation
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| 653 |
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|a Optics, Lasers, Photonics, Optical Devices
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| 653 |
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|a Engineering, general
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| 653 |
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|a Measurement
|
| 700 |
1 |
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|a Marowsky, Gerd
|e [editor]
|
| 041 |
0 |
7 |
|a eng
|2 ISO 639-2
|
| 989 |
|
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|b Springer
|a Springer eBooks 2005-
|
| 856 |
4 |
0 |
|u https://doi.org/10.1007/b137894?nosfx=y
|x Verlag
|3 Volltext
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| 082 |
0 |
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|a 621.36
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| 520 |
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|a This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology
|