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| 008 |
||| eng |
| 020 |
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|a 9783527314942
|
| 100 |
1 |
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|a Tabata, Osamu
|e [Hrsg.]
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| 245 |
0 |
0 |
|a Reliability of MEMS
|h Elektronische Ressource
|b testing of materials and devices
|
| 260 |
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|b Wiley-Blackwell
|c 2008
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| 300 |
|
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|a 325 S.
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| 653 |
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|a Nanotechnology -- Nanomaterials
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| 700 |
1 |
|
|a Tsuchiya, Toshiyuki
|e [Hrsg.]
|
| 041 |
0 |
7 |
|a eng
|2 ISO 639-2
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| 989 |
|
|
|b WILOB
|a Wiley Online Books
|
| 490 |
0 |
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|a Advanced micro and nanosystems
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| 028 |
5 |
0 |
|a 10.1002/9783527622139
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| 776 |
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|z 9783527622139
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| 856 |
4 |
0 |
|u http://onlinelibrary.wiley.com/book/10.1002/9783527622139
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| 082 |
0 |
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|a 539
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| 520 |
3 |
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|a This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes.
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