Reliability of MEMS testing of materials and devices

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon proce...

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Main Author: Tabata, Osamu ([Hrsg.])
Other Authors: Tsuchiya, Toshiyuki ([Hrsg.])
Format: eBook
Language:English
Published: Wiley-Blackwell 2008
Series:Advanced micro and nanosystems
Subjects:
Online Access:
Collection: Wiley Online Books - Collection details see MPG.ReNa
Summary:This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes.
Physical Description:325 S.
ISBN:9783527314942