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1
Published 2004
Springer Berlin Heidelberg
“...This volume is a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, which...”
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2
by Paik, Ungyu
Published 2009
Taylor & Francis
“... the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP...”
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3
Published 1991
Springer US
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4
by Celano, Umberto
Published 2016
Springer International Publishing
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7
Published 1996
Springer Berlin Heidelberg
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9 Table of Contents: “... -- 2.6 Nanoporous Silica Films -- 2.7 Other Porous Materials -- 2.8 References -- 3: Chemical-Mechanical...”
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11
Published 2014
Springer International Publishing
“... piezoelectric techniques and also latest achievements in materials science, condensed matter physics, mechanics...”
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12
by Cheng, Jie
Published 2018
Springer Nature Singapore
“...This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP...”
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14
Published 2017
Springer International Publishing
“... July, 2016). The Proceedings are devoted to processing techniques, physics, mechanics, and applications...”
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15
Published 2016
Springer International Publishing
“... techniques, physics, mechanics, and applications of advanced materials. The book is concentrated on some...”
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16
Published 2007
Springer US
Table of Contents: “... Systems -- Thin Films for Microelectronics and Photonics: Physics, Mechanics, Characterization...”
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17
by Ouyang, Jian
Published 2020
Frontiers Media SA
Subjects: “...Chemical and physical mechanisms...”
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18
by Hummelberger, David
Published 2019
KIT Scientific Publishing
Subjects: “...Physical mechanisms...”