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2 Table of Contents: “...-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings...”

3 Table of Contents: “...-microlithography fabrication of the parts of a micro-mechanical calculator -- Fabricating solid state gears...”

4 Table of Contents: “... for Microlithography -- Significance of Hybrid Evolutionary Computation for Ab Initio Protein Folding Prediction -- A...”

5 Table of Contents: “... Correlation Coefficient -- Analysis of e-beam Microlithography and SEM Imaging Distortions -- Displacement...”