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1
by Ma, Xu
Published 2010
Wiley
Subjects: “...Microlithography / Mathematics...”
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2
Published 2020
Academic Press
“... and low energies, microlithography, image science, digital image processing, electromagnetic wave...”
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3
Published 2022
Elsevier Academic Press
“... (especially semiconductor devices), particle optics at high and low energies, microlithography, image science...”