1 “...The advances of microelectromechanical systems (MEMS) and devices have been instrumental...”

2 Subjects: “...microelectromechanical systems...”

3 Subjects: “...microelectromechanical systems (MEMS)...”

4 Subjects: “...microelectromechanical system (MEMS)...”

5 Subjects: “...microelectromechanical systems (MEMS)...”

6 Subjects: “...microelectromechanical systems (MEMS)...”

7 Subjects: “...microelectromechanical system...”

8 Subjects: “...microelectromechanical systems (MEMS)...”

9 Subjects: “...microelectromechanical systems (MEMS) piezoresistive sensor chip...”

10 Subjects: “...microelectromechanical systems (MEMS) packaging...”

11 Subjects: “...microelectromechanical systems...”

12 Subjects: “...microelectromechanical systems...”

13 “... of magnets and their sensing applications in areas such as biomedicine, microelectromechanical systems, nano...”

14 “..., driven by the advances in integrated circuits and microelectromechanical systems. One of the most...”

15 “...The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS...”

16

17 “...Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS...”

18 “... industries, and microelectromechanical systems is the major trend. Although some structures and parts...”

19 “... industries, and microelectromechanical systems is the major trend. Although some structures and parts...”