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author_facet:"Willson, C. G."
dewey-ones:"621 - Applied physics"
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1
Introduction to microlithography : theory, materials, and processing
Published 1983
American Chemical Society
Subjects:
“
...Lithography /
Research
...
”
Call Number:
TR940
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2
Materials for microlithography : radiation-sensitive polymers
Published 1985
American Chemical Society
Subjects:
“
...Pulse radiolysis /
Research
...
”
Call Number:
TK7871.15.P6
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Author: Willson, C. G.
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Classification: 621 - Applied physics
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621 - Applied physics
Language
English
2
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ACS Symposium Series
2
Author
Thompson, L. F.
2
Willson, C. G.
American Chemical Society Division of Organic Coating and Plastics Chemistry
1
American Chemical Society Division of Polymer Chemistry
1
American Chemical Society Division of Polymeric Materials: Science and Engineering
1
American Chemical Society Meeting ( 1983, Seattle, Washington)
1
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American Chemical Society Meeting ( 1984, St. Louis, Missouri)
1
Bowden, M. J.
1
Fréchet, J. M. J.
1
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