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author_facet:"American Chemical Society Meeting ( 1992, San Francisco, California)"
author_facet:"Tagawa, Seiichi"
dewey-ones:"621 - Applied physics"
product_txtF_mv:"ACS Symposium Series"
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Polymers for microelectronics : resists and dielectrics
Published 1993
American Chemical Society
Subjects:
“
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Polymers
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Call Number:
TK7871.15.P6
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Author: American Chemical Society Meeting ( 1992, San Francisco, California)
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Author: Tagawa, Seiichi
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Classification: 621 - Applied physics
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American Chemical Society Division of Polymeric Materials: Science and Engineering
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American Chemical Society Meeting ( 1992, San Francisco, California)
Tagawa, Seiichi
Thompson, L. F.
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Willson, C. G.
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