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author_facet:"American Chemical Society Meeting ( 1989, Dallas, Texas)"
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Polymers in microlithography : materials and processes
Published 1989
American Chemical Society
Subjects:
“
...Far
ultraviolet
radiation
/
Utilization
...
”
Call Number:
TK7871.15.P6
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Author: American Chemical Society Meeting ( 1989, Dallas, Texas)
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621 - Applied physics
1
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English
1
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ACS Symposium Series
1
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American Chemical Society Division of Polymeric Materials: Science and Engineering
1
American Chemical Society Meeting ( 1989, Dallas, Texas)
Iwayanagi, Takao
1
MacDonald, Scott A.
1
Reichmanis, Elsa
1
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