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author_facet:"American Chemical Society Meeting ( 1984, St. Louis, Missouri)"
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Materials for microlithography : radiation-sensitive polymers
Published 1985
American Chemical Society
Subjects:
“
...
Microlithography
/
Materials
...
”
Call Number:
TK7871.15.P6
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Author: American Chemical Society Meeting ( 1984, St. Louis, Missouri)
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621 - Applied physics
1
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English
1
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ACS Symposium Series
1
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American Chemical Society Division of Polymer Chemistry
1
American Chemical Society Division of Polymeric Materials: Science and Engineering
1
American Chemical Society Meeting ( 1984, St. Louis, Missouri)
Fréchet, J. M. J.
1
Thompson, L. F.
1
Willson, C. G.
1
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