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Microelectronics processing inorganic materials characterization

Bibliographic Details
Corporate Author: American Chemical Society Division of Industrial and Engineering Chemistry
Other Authors: Casper, L. A. (Editor)
Format: eBook
Language:English
Published: Washington, DC American Chemical Society 1986, 1986
Series:ACS symposium series
Subjects:
Fourier Analysis
Microelectronics / Materials / Identification
Technology & Engineering / Electronics / Microelectronics / Bisacsh
Nickel / Analysis
Thin Films / Analysis
Microscopy, Electron, Scanning
Photoelectron Spectroscopy
Semiconductors / Defects
Expert Systems
Trace Elements / Analysis
Gallium Arsenide / Identification
Optical Phenomena
Semiconductor Wafers / Cleaning / Analysis
Ellipsometry / Technique
X-ray Photoelectron Spectroscopy / Application
Spectrum Analysis, Raman
Carbon / Analysis
Photoluminescence / Spectra
Nickel-chromium Alloys / Analysis
Auger Electron Spectroscopy / Application
Spectroscopy, Fourier Transform Infrared
Chromium / Analysis
Semiconductor Wafers / Carbon Content / Measurement
Semiconductors / Materials
Electronics
Semiconductors
Vacuum Technology
Spectrophotometry
Oxides / Analysis
Dielectrics / Research
Microelectronics / Processing
Lasers
Microelectronics / Materials
Phosphorus Compounds / Analysis
Reflectance / Analysis
Scanning Electron Microscopy / Technique
Semiconductors / Materials / Identification
Glass / Analysis
Inductively Coupled Plasma Mass Spectrometry / Utilization
Infrared Imaging / Analysis
Spectrometry, Mass, Secondary Ion
Magnetooptics / Research
Arsenicals / Analysis
Secondary Ion Mass Spectrometry / Application
Electronics / Materials / Analysis
Silicon / Analysis
Semiconductor Wafers / Oxygen Content / Measurement
Fourier Transform Infrared Spectroscopy
Oxygen / Analysis
Integrated Circuits / Very Large Scale Integration / Appropriate Technology
Microprobe Analysis / Application
Gallium / Analysis
Scanning Electron Microscopes / Research
Online Access:
Collection: ACS Symposium Series - Collection details see MPG.ReNa
Description
Item Description:Distributed in print by Oxford University Press
Physical Description:460 pages illustrations
ISBN:9780841211278

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