Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control syst...
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| Format: | eBook |
| Language: | English |
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Singapore
Springer Nature Singapore
2023, 2023
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| Edition: | 1st ed. 2023 |
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| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
| Summary: | This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes |
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| Physical Description: | X, 224 p. 200 illus., 137 illus. in color online resource |
| ISBN: | 9789811992476 |