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221103 ||| eng |
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|a DIN EN ISO 14644-13
|h [electronic resource]
|b Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 1464413:2017); English version EN ISO 1464413:2017, English translation of DIN EN ISO 14644-13:2017-11
|c prepared by Technical Committee ISO/TC 209 "Cleanrooms and associated controlled environments" in collaboration with Technical Committee CEN/TC 243 "Cleanroom technology"
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|a November 2017
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|a Berlin
|b Deutsches Institut für Normung e.V.
|c 2017
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|a 40 Seiten
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|a DIN EN ISO 14644-13:2017-11
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|a DIN EN ISO 14644-13:2017-11
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|a eng
|2 ISO 639-2
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| 989 |
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|b DIN
|a Standards and Norms (DIN Media)
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|a DIN EN ISO 14644-13:2017-11
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|u https://subversion.mpdl.mpg.de/repos/hosting/beuth/DIN_EN_ISO_14644_part13_201711.pdf
|x Verlag
|3 Volltext
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|a 602.18
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|a ICS 13.040.35
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|a 690
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|a 620
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