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00649nmm a2200193 u 4500 |
| 001 |
EB002111051 |
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EBX01000000000000001251141 |
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00000000000000.0 |
| 007 |
cr||||||||||||||||||||| |
| 008 |
221019 ||| |
| 020 |
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|a 9781510617902
|
| 020 |
|
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|a 9781510617896
|
| 245 |
0 |
0 |
|a Micro- and Nanotechnology Sensors, Systems, and Applications X
|h Elektronische Ressource
|
| 260 |
|
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|a Bellingham, Wash.
|b SPIE
|c 2018
|
| 989 |
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|b SPIE
|a SPIE Conference Proceedings
|
| 490 |
0 |
|
|a Proceedings of SPIE
|
| 856 |
4 |
0 |
|u https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10639
|x Verlag
|3 Volltext
|
| 082 |
0 |
|
|a 500
|
| 082 |
0 |
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|a 600
|