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Silicon Sensors and Actuators The Feynman Roadmap

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judg...

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Bibliographic Details
Other Authors: Vigna, Benedetto (Editor), Ferrari, Paolo (Editor), Villa, Flavio Francesco (Editor), Lasalandra, Ernesto (Editor)
Format: eBook
Language:English
Published: Cham Springer International Publishing 2022, 2022
Edition:1st ed. 2022
Subjects:
Materials Engineering
Electronics And Microelectronics, Instrumentation
Electronic Circuits
Materials
Electronics
Microtechnology
Electronic Circuits And Systems
Microsystems And Mems.
Microelectromechanical Systems
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • 1. Silicon as Sensor Material
  • 2. Epitaxial Growth
  • 3. Thin Film Deposition
  • 4. Thin Films Characterization & Metrology
  • 5. Dry silicon etch
  • 6. Lithography
  • 7. HF Release
  • 8. Galvanic growth
  • 9. Wet Etch and Cleaning
  • 10. Piezoelectric materials
  • 11. Wafer to wafer Bonding.-12. Linear and non linear mechanichs in MEMS
  • 13. Inertial sensors
  • 14. Magnetometer
  • 15. MEMS microphones
  • 16. Pressure Sensors
  • 17. Enviromental Sensors
  • 18. Mirror
  • 19. Piezo ink jet printers
  • 20. Speakers
  • 21. Autofocus
  • 22. Electronic sensors front-end
  • 23. Electronic Interfaces for actuators
  • 24. Package
  • 25. Testing
  • 26. Reliability
  • 27. The future of sensor and actuators

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