Micro/Nano Manufacturing
Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...
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| Format: | eBook |
| Language: | English |
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MDPI - Multidisciplinary Digital Publishing Institute
2017
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| Collection: | Directory of Open Access Books - Collection details see MPG.ReNa |
| Summary: | Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. Furthermore, these fundamentally different technology platforms are currently combined in order to exploit the strengths of both platforms. One example is the use of lithography-based technologies to establish nanostructures that are subsequently transferred to 3D geometries via injection molding. Manufacturing processes at the micro-scale are the key-enabling technologies to bridge the gap between the nano- and the macro-worlds to increase the accuracy of micro/nano-precision production technologies, and to integrate different dimensional scales in mass-manufacturing processes. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in micro- and nano-scale manufacturing, i.e., on novel process chains including process optimization, quality assurance approaches and metrology. |
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| Item Description: | Creative Commons (cc), https://creativecommons.org/licenses/by-nc-nd/4.0/ |
| Physical Description: | 1 electronic resource (X, 180 p.) |
| ISBN: | 9783038426059 9783038426042 |