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008 210123 ||| eng
020 |a 9781351832076 
100 1 |a Francis, Laurent A.  |e editor 
245 0 0 |a Novel Advances in Microsystems Technologies and Their Applications  |c Laurent A. Francis, Krzysztof Iniewski 
250 |a 1st 
260 |b CRC Press  |c 2017 
300 |a 621 pages  |b 310 illustrations) 
653 |a Microelectronics / fast / (OCoLC)fst01019757 
653 |a microelectronics / aat 
653 |a Microelectromechanical systems / http://id.loc.gov/authorities/subjects/sh97007351 
653 |a Microelectronics / http://id.loc.gov/authorities/subjects/sh85084822 
653 |a Microelectromechanical systems / fast / (OCoLC)fst01019745 
653 |a Microsystèmes électromécaniques 
653 |a Microélectronique 
700 1 |a Iniewski, Krzysztof  |e editor 
041 0 7 |a eng  |2 ISO 639-2 
989 |b OREILLY  |a O'Reilly 
490 0 |a Devices, Circuits, and Systems 
015 |a GBB839559 
856 4 0 |u https://learning.oreilly.com/library/view/~/9781466560673/?ar  |x Verlag  |3 Volltext 
082 0 |a 621.381 
082 0 |a 621.381