Levitation Micro-Systems Applications to Sensors and Actuators
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -a...
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| Format: | eBook |
| Language: | English |
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Cham
Springer International Publishing
2021, 2021
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| Edition: | 1st ed. 2021 |
| Series: | Microsystems and Nanosystems
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| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
| Summary: | This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements |
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| Physical Description: | IX, 174 p. 93 illus., 91 illus. in color online resource |
| ISBN: | 9783030589080 |