Micro Electro Mechanical Systems

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...

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Corporate Author: SpringerLink (Online service)
Other Authors: Huang, Qing-An (Editor)
Format: eBook
Published: Singapore Springer Singapore 2019, 2019
Series:Micro/Nano Technologies
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • Device Physics
  • Scaling effect
  • Sensors
  • Actuators
  • Micro fluid and bio MEMS
  • Integration techniques
  • Micro systems