Micro Electro Mechanical Systems
This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...
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| Format: | eBook |
| Language: | English |
| Published: |
Singapore
Springer Singapore
2020, 2020
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| Series: | Micro/Nano Technologies
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| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Device Physics
- Scaling effect
- Sensors
- Actuators
- RF MEMS
- Micro fluid and bio MEMS
- Integration techniques
- Micro systems